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System Division
Division of Coating Business
R & D
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CSR

R&D Status

Laboratory Equipment

R&D Devices

Development of Vacuum Equipment by Year
R&D Status
KOVA Pursues Creativity and State of the Art Techonology.

Laboratory Equipment

R&D Devices

Development of Vacuum Equipment by Year
Laboratory Equipment
InnoMet-VH1100
Key Research Items : Various metal coating and color film coating on resin base material
InnoMet-Vh1100 Main Specifications
  • Chamber : Ø1100x1100 Jig Ø900x900
  • Plasma Properties Analysis
    • Plasma(MF)
    • Plasma(RF)
    • Endhole Type Ion Source
    • Closed Drift Ion Source
  • Thin Film Coating
    • DC,RF CATHODE(BMS,UBMS) 3ea
    • REACTIVE　Sputter
    • PECVD
    • Multi Coating by E-Beam
  • Utilities for various kinds of coating
    • Various Target
      - SUS, Al ,Cr,Ag,Sn,Ti,Ni,SiO2,ZrO2...
    • Reactive gas control function
      - Ar,HMDSO,N2,O2,N2O,CH4...
    • Realtime thin film control System
      - MDC-360
    • Analysis of thin film properties
      - Alpha Step -Film thickness analysis
      - XRD-crystal structure analysis
      - UV/VIS spectrometer -Transmission/Reflection measurement
Performance of R&D technology development
Automotive Lamp, LED Reflector Mobile Phone Case
Mobile Phone Touch Screen Film
Harmet -1000
Key Research Items : High-hardness film coating on metallic materials (2000HV ~ 4500HV)
Harmet-1000 Main Specifications
  • Chamber Ø1000x1500H Jig Ø700x1000
  • Plasma Properties Analysis
    • Plasma(MF/RF)
    • Bias(DC, RF, Puls DC)
    • Endhole Type Ion Source
    • Closed Drift Ion Source
  • Thin Film Coating
    • DC, RF(BMS, UBMS) 2ea 4 extension points
    • REACTIVE Sputter
    • PECVD
    • ARC 4",5" 3equipped areas (12 extension areas)
    • S-FCA Cathode Equipped
  • Utilities for various kinds of coating
    • Various Target
      - AiTi,AlCr,AlSi,Cr,Ag,Sn,Ni,SiO2,C...
    • Reactive gas control function
      - Ar,HMDSO,N2,O2,N2O,CH4,C2H2...
    • Hybrid coating control
      - Sputter+AIP+PECVD
    • Analysis of thin film properties
      - Alpha Step-Film thickness analysis
      - XRD-crystal structure analysis
      - UV/VIS spectrometer- Transmission/Reflection measurement
Performance of R&D technology development
Extrusion and Drawing Dise for metal plastic processing Metal Press, Hard coating of molded surface for PVC injection formation
Metal cutting tools and various dental tools requiring abrasion resistance
Harmet -800DLC
Key Research Items : High-hardness film coating on metallic and resin materials(1500HV ~ 4500HV)
Harmet-800DLC Main Specifications
  • Chamber Ø1000x 2900H Jig Ø700x1850H
  • Plasma Properties Analysis
    • Plasma(DC/RF)
    • Bias(DC, RF, Puls DC)
  • DLC(Diamond Like Carbon) thin film coating
    • DC,RF PECVD
  • Utilities for various kinds of coating
    • Reactive gas control function
      - Ar,HMDSO,N2,O2,N2O,CH4,C2H2...
    • Analysis of thin film properties
      - Alpha Step-Film thickness analysis
      - XRD-crystal structure analysis
      - Adhesion, surface hardness(1500HV~4500HV)
      - Friction coefficient measurement etc.
Performance of R&D technology development
Metal cutting tools requiring high-hardness, wear resistance and longevity Various automotive parts requiring wear resistance and high lubricity
Metal processing tools and various special parts requiring abrasion resistance and high lubricity
Linemet - 4V
Key Research Items : Metallic film coating and color coating large-scaled Glass
Linemet-4V Main Specifications
  • Chamber 1500Wx 1800Hx4개 Jig 1200Wx1300H
  • Plasma Properties Analysis
    • Plasma(MF/RF)
    • Bias(DC, RF, Puls DC)
  • Thin film coating
    • DC,RF (BMS,UBMS) 2ea 4 extension points
    • REACTIVE Sputter is possible
    • PECVD is possible
  • Utilities for various kinds of coating
    • Various Target
      - AiTi,AlCr,AlSi,Cr,Ag,Sn,Ni,SiO2,C...
    • Reactive gas control function
      - Ar,HMDSO,N2,O2,N2O,CH4,C2H2...
    • Hybrid coating control
      - Sputter+AIP+PECVD
    • Analysis of thin film properties
      - Alpha Step-Film thickness analysis
      - XRD-crystal structure analysis
      - UV/VIS spectrometer-Transmission/Reflection measurement
Performance of R&D technology
Glass Transparent Touch Screen Panel for Mobile
Energy saving and various color coating on large construction glasses by blocking ultraviolet rays

Addresses and DirectionsProducts and Quotations World Customer Map

Head office/1st Factory : 80, Dalseong2chadong 3-ro, Guji-myeon, Dalseong-gun, Daegu, Republic of Korea /
2nd Factory : 23, Dalseong2cha 3-ro, Guji-myeon, Dalseong-gun, Daegu, Republic of Korea (Dalseong Industrial Complex 20B. 2L.)
TEL : +82-53-591-7720 / FAX : +82-53-591-7723~4
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